Isolating vacuum feedthrough for rotatable magnetrons

摘要

The magnetron cathode arrangement has a rotatable shaft (11) arranged rotatably in vacuum tight position with a housing (20) of a drive unit (15). An insert of cylindrical-tubular shape manufactured from an insulator is placed between the rotatable shaft and the housing. A counter sliding surface assigned to the insert rotates relatively on rotation of the cathode. The insert and the counter sliding surface have a mutual sealing, where a dynamic seal is provided in the sliding surface.