Structure comprising Peltier cells integrated on a semiconductor substrate and corresponding manufacturing process

摘要

Structure (10) integrated on a semiconductor substrate (11) comprising at least one elementary Peltier cell which comprises:
a conductive region (15) formed in the semiconductor substrate (11) being less resistive with respect to the semiconductor substrate (11),
a first semiconductive region (19) projecting from the semiconductor substrate (11) in electric contact with the conductive region (15),
a second semiconductive region (23) projecting from the semiconductor substrate (11) in electric contact with the conductive region (15) and spaced from the first semiconductive region (19), the first semiconductive region (19) and the second semiconductive region (23) having different type of conductivity.