发明名称 |
Microscope comprising a focus error detecting optical system |
摘要 |
A focus error detecting optical system (20) has an optical parameter which makes a focus lock-in range by a focus error signal (E) be a value capable of detecting focus on a front surface of a cover glass (52) and focus on a back surface thereof separately. A control section (3), based on the focus error signal obtained by the focus error detecting optical system (20), brings a focal point of an observational optical system (10) to a focus position. Further, focus error detecting optical systems (20) include optical units each having an optical parameter corresponding to a numerical aperture of respective objective lenses (11). A control section selects (3) the optical unit of the focus error detecting optical system corresponding to the objective lens (11) in use. The control section, using a focus error signal obtained by the selected focus error detecting optical system, brings a focal point of an observational optical system to a focus position.
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申请公布号 |
EP1840623(A2) |
申请公布日期 |
2007.10.03 |
申请号 |
EP20070006439 |
申请日期 |
2007.03.28 |
申请人 |
YOKOGAWA ELECTRIC CORPORATION |
发明人 |
MIKURIYA, KENTA;KEI, TAKAYUKI;YOKOYAMA, YASUNORI;CHIDA, NAOMICHI;NAGANUMA, YOSHIAKI |
分类号 |
G02B21/24;G02B7/28;G02B7/32 |
主分类号 |
G02B21/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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