VACUUM SIDE CHANNEL COMPRESSOR

摘要

A vacuum side channel compressor ( 10 ) comprises a pump stator ( 14 ) and a pump rotor ( 12 ), which surround a side channel ( 31,32,33,34 ). An axial bearing ( 22 ) is provided for mounting the pump rotor ( 12 ). A sealing gap ( 40 ) is formed next to the side channel between the pump stator ( 14 ) and the pump rotor ( 12 ), part of which forms a conical ring whose imaginary cone apex ( 50 ) lies in the vicinity of the axial bearing ( 22 ).