CONNECTING METHOD OF GROUND STRAP OF SUBSTRATE PROCESSING APPARATUS AND CONNECTING DEVICE OF GROUND STRAP

摘要

A method for connecting a ground line of a substrate processing apparatus is provided to remarkably reduce the danger of disconnection caused by accumulation of fatigue by heightening the height at which the upper part of a ground line is fixed. An upper fixing terminal(100) is formed at the lateral part of a substrate placement table(12), lower than that upper surface of the substrate placement table and higher than the lower surface of the substrate placement table. A lower fixing terminal(30) is formed on the lower surface of the inside of the chamber. One end of a ground line(50) of a band type is fixed to the upper fixing terminal. The other end of the ground line is fixed to the lower fixing terminal in a manner that the ground line is not twisted.