| 摘要 |
A micro pressure sensor is provided to control the interval of measuring steps for a resistant body by controlling the interval between a metallic thin film and a point thin film, and the resistant body. A micro pressure sensor(100) comprises a conductive diaphragm(2), a lower end wafer(4), an upper end wafer(1), a plurality of ring-type metallic thin films(10), a plurality of resistant bodies(13), and a power source unit(9). An upper chamber having an opened upside is positioned at one side of the diaphragm. The upper end wafer is formed opposite to the diaphragm and combined with an upper surface of the lower end wafer to seal the upper chamber. The plural ring-type metallic thin films are separated mutually around a ring-type standard thin film(11) formed at the center of the lower end surface for the upper end wafer. The plural resistant bodies are continuously connected with the metallic thin film in series in the diameter direction of the ring-shape from the standard thin film. The power source unit includes a lead wire(8) connecting the metallic thin film with the resistant body electrically.
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