发明名称 |
Cathode assembly for indirectly heated cathode ion source |
摘要 |
A cathode in an indirectly heated cathode ion source is supported by at least one rod or pin. The cathode is preferably in the form of a disk, and the support rod is smaller in diameter than the disk to limit thermal conduction and radiation. In one embodiment, the cathode is supported by a single rod at or near its center. The support rod may be held by a spring-action clamp for simple and reliable clamping and unclamping. The disk shaped cathode and the support rod may be fabricated as a single piece. A filament that emits electrons thermionically may be disposed around the rod in close proximity to the cathode.
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申请公布号 |
US7276847(B2) |
申请公布日期 |
2007.10.02 |
申请号 |
US20010826274 |
申请日期 |
2001.04.04 |
申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
OLSON JOSEPH C.;KLOS LEO;RENAU ANTHONY;VENUTO NICHOLAS A. |
分类号 |
H01J29/46;H01J27/02;H01J27/08;H01J37/08 |
主分类号 |
H01J29/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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