发明名称 Cathode assembly for indirectly heated cathode ion source
摘要 A cathode in an indirectly heated cathode ion source is supported by at least one rod or pin. The cathode is preferably in the form of a disk, and the support rod is smaller in diameter than the disk to limit thermal conduction and radiation. In one embodiment, the cathode is supported by a single rod at or near its center. The support rod may be held by a spring-action clamp for simple and reliable clamping and unclamping. The disk shaped cathode and the support rod may be fabricated as a single piece. A filament that emits electrons thermionically may be disposed around the rod in close proximity to the cathode.
申请公布号 US7276847(B2) 申请公布日期 2007.10.02
申请号 US20010826274 申请日期 2001.04.04
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. 发明人 OLSON JOSEPH C.;KLOS LEO;RENAU ANTHONY;VENUTO NICHOLAS A.
分类号 H01J29/46;H01J27/02;H01J27/08;H01J37/08 主分类号 H01J29/46
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