| 摘要 |
An atmospheric pressure plasma generating apparatus is provided to treat a large three-dimensional sample by applying a lower electrode to increase the generation length of plasma. An atmospheric pressure plasma generating apparatus includes an upper electrode(1), an antenna electrode(2), and an antenna(3). The antenna(3) is connected to the antenna electrode(2). The upper electrode(1), the antenna electrode(2), and the antenna(3) are installed in a plasma generating unit(8). A propeller(6) is located at the upper part of the plasma generating unit(8). The plasma generating unit(8) and the propeller(6) are surrounded by a chamber(7). A hole for inputting operation gas is located at the upper part of the chamber(7). The plasma generating unit(8) and the propeller(6) rotate so as to blow wind downwardly. A sample(10) is located at the lower part of the upper electrode(1) and the antenna electrode(2). The sample(10) is continuously moved by a sample moving belt(11). A lower electrode(4) is located at the lower part of the sample moving belt(11), and is surrounded by a dielectric(5). |
