| 摘要 |
A low pressure chemical vapor depositor having multi-sealing structure is provided to seal a large area between an outer tube and an inlet flange without generating the leakage. A low pressure chemical vapor depositor having multi-sealing structure comprises: an outer tube(101) including a bell-shaped body(110) of which an upper end portion is sealed, and of which a lower portion is opened, and a ring-shaped tube flange part(111) horizontally projected to the outer side from the lower end portion of the body; an inlet flange(120) having an upper flange part(121) that comes in contact with the tube flange; at least two rows of annular frames(121a) disposed in a predetermined distance on an upper surface of the upper flange part; and at least two O-rings(124) mounted on the annular frames to seal between the tube flange and the upper flange part.
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