APPARATUS FOR USE IN CALIBRATION

摘要

A calibration apparatus is provided to enhance process efficiency by utilizing previously stored sampling sites in a correcting process of a reference point in sampling sites. A site checking unit samples and checks sites used in an overlay calibration process from a plurality of sites on a wafer after an exposure process is performed. An automatic setting unit sets automatically the sampled sites except for a reference point when the reference point of the reference site of the sites sampled from the site checking unit is changed. The sites set in the automatic setting unit are set as the same patterns as the patterns of the sites checked in the site checking unit before the reference site is changed.