| 摘要 |
<p>An internal diameter fixing jig for pellicle frame is provided to simplify an entire structure and to reduce a product cost by composing a component supporting an internal diameter of the pellicle frame as only an internal diameter insertion block to support an internal diameter of a pellicle frame. A base(10) is formed with a tubular structure. An internal diameter insertion block(20) is formed at a center of the base. A fixing plate(30) is fixed to an upper surface of the internal diameter insertion block by using a bolt(35). An external part of the fixing plate is protruded to the outside of the upper surface of the internal diameter insertion block. A pellicle frame is inserted into a periphery of the outside of the internal diameter insertion block. The fixing plate is fixed to the upper surface of the internal diameter insertion block by using the bolt so that the pellicle frame is fixed between the external part of the fixing plate and the base.</p> |
