| 摘要 |
A substrate detecting apparatus of a vacuum processing chamber is provided to minimize errors through an opaque shielding member to sense indirectly a transparent substrate. A substrate detecting apparatus includes a light emitting unit(31) and a light receiving unit(32). The light emitting unit and the light receiving unit are installed at a lateral part of the chamber. The substrate detecting apparatus further includes a light shielding member. The light shielding member is positioned between the light emitting unit and the light receiving unit in order to shield the light in a loading state of the substrate. The light shielding member is rotatably coupled with a fixing part fixed to the chamber. An elevating direction of one end of the light shielding member is opposite to that of the other end of the light shielding member.
|
