| 摘要 |
An apparatus for storing wafers is provided to enable searching and checking of information in a wafer storing apparatus itself by installing a user interface part in the wafer storing apparatus wherein the user interface part displays and controls the internal circumstantial information of the wafer storing apparatus, the number of wafers received in the wafer storing apparatus, the stack state and the process history of the wafers. Slots on which a plurality of wafers are stacked are formed in a housing(110). The housing is closed and opened by a door. A user interface part(150) displays and controls the circumstance information in the housing and the history of the wafer, installed on the outer wall of the housing and including an image formation unit(152) and a touch screen panel(154). The image formation unit displays the circumstance information and the history to the outside. The touch screen panel is installed on an image formation surface(153) included in the image formation unit. The history of the wafers are inputted to the touch screen panel according to the contact position information on the image formation surface.
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