POWER SUPPLY APPRATUS AND METHOD FOR SUPPLYING VOLTAGE OF ELECTRO STATIC CHUCK THEREOF

摘要

An apparatus for supplying power supply of an electrostatic chuck is provided to transfer uniform chucking force to an electrostatic chuck and a wafer without increasing the level of an RF power source by simultaneously supplying a positive voltage to two electrodes formed on the back side of the electrostatic chuck. An RF power generating part(14) generate an RF voltage. An electrostatic chuck(12) includes two electrodes(12a,12c) that receive an RF positive voltage generated from the RF power generating part and transfer uniform chucking force. The two electrodes can be formed on the back side of the electrostatic chuck to supply the same positive voltage.