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发明名称
HIGH-RESOLUTION GAS GAUGE PROXIMITY SENSOR
摘要
申请公布号
SG135007(A1)
申请公布日期
2007.09.28
申请号
SG20030074887
申请日期
2003.12.16
申请人
ASML HOLDING N.V.
发明人
GAJDECZKO BOGUSLAW F.;BOGURSKY KENNETH M.;GALBURT DANIEL N.;SANDER WILLY M.;VIOLETTE KEVIN J.
分类号
(IPC1-7):G01B13/00
主分类号
(IPC1-7):G01B13/00
代理机构
代理人
主权项
地址
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