| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor with its manufacturing process simplified, a blurring detector using this, and a manufacturing method for the angular velocity sensor. <P>SOLUTION: This angular velocity sensor is equipped with a substrate 1, first and second vibration elements 4 and 5 fitted on the substrate 1, an IC 3 mounted on the substrate 1 and electrically connected to the first and second vibration elements 4 and 5, and a case 7 fitted on the substrate 1 for covering the vibration elements 4 and 5. Only the case 7 and a part of the substrate 1 are together fixed with an adhesive so that a gap is formed between the case 7 and the substrate 1. <P>COPYRIGHT: (C)2007,JPO&INPIT |
