| 摘要 |
PROBLEM TO BE SOLVED: To sample the behavior data of an apparatus with respect to a die coater, which applies coating to the surface of a substrate, to control the same in relation to each substrate. SOLUTION: This data collecting system of the die coater has an acceleration detector for measuring the vibration of the stage of the die coater for coating the surface of the substrate, an acceleration detector for measuring the vibration of the die head of the die coater, a driver for measuring the speed of the die head of the die coater and a data preserving means for sampling the signals from the respective detectors and the driver to store the sampling data only during the operation of the die coater at the time of passage of the substrate to preserve the same. COPYRIGHT: (C)2007,JPO&INPIT
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