DIFFUSION BARRIER COATINGS HAVING GRADED COMPOSITIONS AND DEVICES INCORPORATING THE SAME

摘要

Disclosed is a composite article and methods for making a composite article where the composite article includes a coating material formed from an organic material having a first refractive index and an inorganic material having a second refractive index where the refractive indexes match. The methods may include depositing the coating using a plasma-enhanced chemical-vapor deposition technique. The methods may further include varying the deposition rate of one or both of the organic and inorganic material so as to match the refractive indexes.