Micromechanical structure e.g. micromechanical capacitive transducer, for e.g. receiving acoustic signal, has electrodes and contact point for adjusting rigidity of attachment and exerting electrostatic force directly/indirectly on arm

摘要

The structure has a diaphragm (1) that is provided to be mechanically attached by a suspension arm (30), and electrodes (41, 42) and a contact point (45) that are provided for adjustment of rigidity of the attachment. The electrodes and contact point are provided for exerting an electrostatic force (46) directly or indirectly on the arm. The electrodes and contact point are provided in such a manner that the force is exerted in a main extending layer of the diaphragm on the arm. An independent claim is also included for a method for receiving and/or for generating acoustic signals in a medium.