| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a droplet ejection apparatus which provides a good ejection state of droplets, without a leakage of a coating liquid at a head part. <P>SOLUTION: The droplet ejection apparatus includes: a main tank 6; a sub tank 7; a head part 4; a coating liquid supply pipe 20 for supplying a coating liquid of the main tank 6 to the head part 4; a coating liquid recovery pipe 22 for returning the coating liquid discharged from the head part 4 to the sub tank 7; an intertank transferring pump 13 for feeding the coating liquid in the sub tank 7 to the main tank 6; an intertank transferring pump 14 provided on the way to the intertank transferring pipe 13; and decompression means 9, 11 for main tank for decompressing inside the sub tank, and decompression means 16, 17 for sub tank for decompressing inside the sub tank, wherein the tanks 6, 7 are disposed at positions higher than the head part 4 with the inner pressure of the sub tank 7 kept lower than that of the main tank 6. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
