| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve a collection rate of chemical discharged from a protective film removing device. <P>SOLUTION: The device is provided with a collection path, connected to atmosphere where a substrate is placed for collecting chemical, an intermediate tank arranged at an exit end of the collection path, a means for previously supplying volatilization prevention liquid, whose specific gravity is smaller than chemical and which is separated from chemical into the intermediate tank, a solution sending path whose entrance end is disposed in the intermediate tank and which has a bulb, a collection tank installed at the exit end of the solution sending path, a liquid level monitoring means for monitoring a liquid level of the intermediate tank, and a control means for opening the bulb of the solution sending path and supplying chemical in the intermediate tank to the collection tank, when the liquid level in the intermediate tank becomes a set level which has previously been set. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
