发明名称 SEMICONDUCTOR DEVICE INCLUDING MOS TRANSISTOR WITH LOCAL OXIDATION OF SILICON (LOCOS) OFFSET STRUCTURE AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To efficiently manufacture on the same semiconductor substrate a high breakdown voltage LOCOS offset transistor with a structure having no off leakage current by providing no LDD region and a regular low breakdown voltage transistor with a structure having no off leakage current by providing an LDD region. SOLUTION: The semiconductor device has on a semiconductor substrate 1 at least one LOCOS offset transistor 29 or 31 and at least one regular transistor 15 or 17, wherein the LOCOS offset transistor does not have an LDD region between the channel and source and the channel and drain, while the regular transistor has an LDD region between the channel and source and the channel and drain. The LDD region is composed of two kinds of low concentration diffusion layer regions with different conductivity types. By providing no LDD region on the LOCOS offset transistor and providing an LDD region on the regular transistor, the two can have no off leakage current. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007251082(A) 申请公布日期 2007.09.27
申请号 JP20060076028 申请日期 2006.03.20
申请人 RICOH CO LTD 发明人 KIJIMA MASATO
分类号 H01L21/8234;H01L21/822;H01L21/8238;H01L27/04;H01L27/088;H01L27/092 主分类号 H01L21/8234
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