| 发明名称 |
SHORT WAVELENGTH ULTRAVIOLET DETECTOR AND ITS MANUFACTURING METHOD |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a short wavelength ultraviolet detector having improved oblique incidence characteristics of the short wavelength ultraviolet detector. <P>SOLUTION: In the short wavelength ultraviolet detector 7 having therein an ultraviolet light receiving element 4 of a diamond thin film photoconductive type in which electric resistance varies by irradiation with short wavelength ultraviolet rays, the short wavelength ultraviolet detector 7 is characterized by including an ultraviolet transmission window plate 1 on whose surface or inside a binary lens is formed, wherein the ultraviolet light receiving element 4 is sealed in an airtight container 9 having the ultraviolet transmission window plate 1 as a light receiving part so as to be disposed opposite the ultraviolet transmission window plate 1. <P>COPYRIGHT: (C)2007,JPO&INPIT |
| 申请公布号 |
JP2007248062(A) |
申请公布日期 |
2007.09.27 |
| 申请号 |
JP20060067932 |
申请日期 |
2006.03.13 |
| 申请人 |
NAMIKI PRECISION JEWEL CO LTD;IWASAKI ELECTRIC CO LTD;KOBE STEEL LTD |
发明人 |
MATSUOKA MIKIHIKO;ISHIHARA HIDEAKI;TACHIBANA TAKESHI;HAYASHI KAZUYUKI;SHIBATA DAISUKE;NAKATANI TAKAYUKI;TAKEDA HIDETOSHI;HATAZAWA RIYOUJIN;FURUTAKI TOSHIRO |
| 分类号 |
G01J1/02;G01J1/04;H01L31/02 |
主分类号 |
G01J1/02 |
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