| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope to obtain a scanning image with high spatial resolution in a low accelerating voltage range. SOLUTION: An accelerating cylinder 9 is positioned on an electron beam passage of an objective lens 8, and latter stage accelerating voltage 10 of a primary electron beam is applied. Application of overlaying voltage 13 onto a sample 12 forms a decelerating electric field toward the primary electron beam between the accelerating cylinder 9 and the sample 12. A secondary signal 23 such as a secondary electron or a reflecting electron generated from the sample 12 is absorbed into the accelerating cylinder 9 with the electric field (decelerating field) immediately before the sample, and is detected by a secondary electron detecting apparatus positioned over the accelerating cylinder 9. COPYRIGHT: (C)2007,JPO&INPIT
|
