| 摘要 |
PROBLEM TO BE SOLVED: To measure the displacement amount of an object surface shape, after being changed into measuring sensitivity in response to the displacement amount. SOLUTION: A light beam from a laser beam source installed in a confocal scanning optical system is converged by an objective lens in an inside, to make a light beam convergence point serve as a primary image focusing face. A beam from the primary image focusing face is directed toward a magnification conversion optical system, to be guided onto an object having a positional relation conjugated with the primary image focusing face. The objective lens is vibrated for measurement, along an optical axis direction as a vibrating body, and reflected beam generated on an object surface is returned to the confocal scanning optical system to be converged on a pinhole. A transmission beam through the pinhole is detected by a photodetector, to serve as the object surface displacement amount. The magnification conversion optical system converts a magnification, in response to the object surface shape to provide the measuring sensitivity in response to the displacement amount. COPYRIGHT: (C)2007,JPO&INPIT
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