| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure a width of a required portion of a product deposited with foreign matter while eliminating an influence of the foreign matter. SOLUTION: An image of a measuring objective portion is photographed in the product deposited with the foreign matter, a width value of the measuring objective portion in each measuring line is found based on a lightness difference on the large number (preferably 7 or more) of parallel measuring lines, and an average value is calculated excepting upper 1/3 or more of number out of the large number of the width values. Accurate measurement is allowed because the width value of the foreign matter deposited portion is excepted. COPYRIGHT: (C)2007,JPO&INPIT
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