| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor, which has a stopper structure, especially a stopper structure manufactured by a micromachining process, capable of preventing such a fault that a deadweight and a stopper part are bonded, and a manufacturing method of the acceleration sensor. <P>SOLUTION: This acceleration sensor has a deadweight fixing part, a seat fixing part which spaces/surrounds the deadweight fixing part, a beam part which flexibly connects the deadweight fixing part and the seat fixing part, a first substrate having a stopper part which is spaced from the deadweight fixing part and the beam part and connected to the seat fixing part, a deadweight part which is connected to the deadweight fixing part via a first connection layer and which is spaced from the stopper part and overlain, a seat part which is spaced from the deadweight part and which is connected to the seat fixing part via a second connection layer, and a protrusion part which is spaced from the stopper part and which is formed on the deadweight part between the stopper part and the deadweight part. <P>COPYRIGHT: (C)2007,JPO&INPIT |
