| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a functional film-containing structure capable of preventing a decrease of a characteristic of the functional film while relaxing a stress between the functional film and a base plate, and to provide its manufacturing method. <P>SOLUTION: The functional film-containing structure 10 has a stress relaxation layer 16 composed of a soft metal or lubricative fine particulate eutectoid plating each placed between the base plate 12 and the functional film 14. The soft metal is preferably a metal or a composite material containing a metal as a major component each having hardness of not more than 300 kg/mm<SP>2</SP>. For example, the soft metal is either one of Sn, In, Ag, Al, Cu, Zn and Au, and the composite material is an alloy of a metallic composition containing at least one of these metals. The functional film 14 is preferably formed and fixed directly on the base plate 22 by an aerosol deposition method or the like, and the thickness of the film is preferably not more than 100 μm. <P>COPYRIGHT: (C)2007,JPO&INPIT |
