| 摘要 |
PROBLEM TO BE SOLVED: To provide a silicon carbide sliding member capable of effectively preventing generation and accumulation of static electricity due to contact and friction with a mating member even when used in a condition in contact with insulation fluid having a high specific resistance value such as ultrapure water. SOLUTION: In this silicon carbide sliding member P1 used in a condition in contact with the water having a high specific resistance value of 5Ωcm or more such as ultrapure water or pure water being similar to it, functional water, etc., a silicon carbide chemically deposited film pa1 having a specific resistance value of 1Ωcm or less is coated on at least a sliding face PA. The silicon carbide chemically deposited film pa1 is forcedly oriented on a (220) face in Miller indices display so that its specific resistance value becomes 1Ωcm or less. A basic body pb1 of the sliding member P1 is a silicon carbide sintered body having density of 3.00 g/cm<SP>3</SP>or more and purity of silicon carbide of 80% or more. Thickness of the silicon carbide chemically deposited film pa1 is 10μm to 2 mm, and purity of silicon carbide of the film pa1 is 99.99% or more. COPYRIGHT: (C)2007,JPO&INPIT
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