| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device, capable of inspecting a sample accurately by automatically and instantly detecting the performance abnormality of the device itself which cannot be determined by visual inspection, while detecting the kind and the concentration of the sample, and to provide an inspection method that uses the inspection device. SOLUTION: An XRF device 100 for detecting the kind and the concentration of the first element, constituting the sample 3, is equipped with an X-ray tube 1 for irradiating a primary X-ray 20 toward the sample 3 and a reference member 4 constituted of the second element, whose kind and concentration are known which is different from the first element; and a detector 5 for detecting the first secondary X-ray 21 characteristic of the first element generated from the sample 3 by irradiation of the primary X-ray 20, and detecting the second secondary X-ray 22 characteristic of the second element generated from the reference member 4. The reference member 4 is characterized by being provided on the optical path of the primary X-ray 20. COPYRIGHT: (C)2007,JPO&INPIT
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