COPPER ELECTROLYTE, METHOD FOR MANUFACTURING ADDITIVE USED FOR COPPER ELECTROLYTE, AND ELECTRODEPOSITION COPPER FILM OBTAINED BY USING THE COPPER ELECTROLYTE

摘要

PROBLEM TO BE SOLVED: To provide a sulfuric acid-based copper electrolyte capable of stably yielding a uniform electrodeposition copper film as the electrolyte has an equivalent gloss as compared to the conventional sulfuric acid-based copper electrolyte. SOLUTION: The sulfuric acid-based copper electrolyte includes a bis(3-sulfopropyl)disulfide component. The conventional sulfuric acid-based copper electrolyte added with the As the supply source of bis(3-sulfopropyl)disulfide component, a bis(3-sulfopropyl)disulfide copper hydrate is used. The bis(3-sulfopropyl)disulfide copper hydrate is manufactured by a process of causing crystallization using an organic solvent from a solution mixture prepared by adding a cupric chloride to an aqueous 3-mercapto-1-propane sodium sulfate. COPYRIGHT: (C)2007,JPO&INPIT