| 摘要 |
A heating device includes a substantially cylindrical shaft joined to a joint surface of a plate-shaped ceramic substrate opposite to a heating surface, the ceramic substrate including a resistance heating element embedded in the ceramic substrate. The shaft includes a flange portion formed in the end joined to the ceramic substrate and a first cylindrical portion connecting to the flange portion, and a ratio D 3 /D 1 of an inner diameter D 3 of a joint area in the flange portion and an outer diameter D 1 of the first cylindrical portion is not less than 92%.
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