LAMINATED BODY AND CARBON FILM DEPOSITION METHOD

摘要

There is provided a resin material in which its thermal conductivity, slidability, heat resistance, strength, and rigidity are enhanced to give it characteristics such as, for example, a high thermal conductivity, rigidity, damage prevention, and a high slidability. A method for fabricating such resin material is also provided. In a laminated body, a resin material and a carbon film are laminated or a plasma-resistant film is integrally molded on the resin material if needed. The carbon film is from 50 nm to 10 µm in thickness, has a thermal conductivity of 70 W/mK to 700 W/mK and a resistivity value of 1 OE10⁷ Ocm or more(at 100 °C), and also has a spectrum peak at a Bragg angle (2? ± 0.3°) of 41° to 42° in an X-ray diffraction spectrum by CuK_a1 rays. As a method for depositing the carbon film on the resin material, the following method is employed. A reaction gas mixed with argon and/or hydrogen is used and a plasma is generated at a gas pressure of 1 Pa to 100 Pa. A substrate with the plasma-resistant film is disposed at the position where an electron temperature of the plasma is 0.5 eV to 3.0 eV, and radical particles in the plasma are moved from the origin of the generation of the plasma toward the substrate so as to substantially uniformly reach the surface of the substrate.