| 摘要 |
PROBLEM TO BE SOLVED: To provide a film thickness measuring method and so forth capable of precisely measuring a thickness of a light transmitting film provided on a support substrate. SOLUTION: In the film thickness measuring method for measuring the film thickness of the film having light transmitting properties provided on the support substrate, light is incident on the film, reflected light obtained by interference between the light reflected by a surface of the film and the light reflected by a surface of the support substrate is dispersed, the amount of light of the separated reflected light is detected, wavelengths where the reflectance is at the minimum or the maximum are acquired by magnifying reflectance at an arbitrary size when calculating the reflectance from the amount of light, and the wavelengths at which the reflectance is at the minimum and the maximum and refractive index of the film are used to measure the thickness of the film. COPYRIGHT: (C)2007,JPO&INPIT
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