| 摘要 |
PROBLEM TO BE SOLVED: To enhance life prediction precision and practical usability, when evaluating a breakage life, by inspecting a change in a surface texture of an evaluating object, using an EBSP method. SOLUTION: This breakage life evaluation device is provided with an electron beam irradiating means for irradiating a sample of the evaluating object with an electron beam, while scanned, a photographing means for photographing an electron backscattered analytical image formed by backscattering the electron beam emitted to the sample, an image processing means for generating a crystal grain boundary distribution in a prescribed area of the sample, by image-processing the electron backscattered analytical image, an average crystal grain size calculating means for calculating an average crystal grain size, based on the crystal grain boundary distribution, a breakage life determination means for determining the breakage life of the evaluating object, based on a characteristic curve for indicating a correlation between the average crystal grain size and the breakage life of the evaluating object, and based on the average crystal grain size calculated by the average crystal grain size calculating means, and an output means for outputting a determination result of the breakage life. COPYRIGHT: (C)2007,JPO&INPIT
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