| 摘要 |
PROBLEM TO BE SOLVED: To provide a novel microvalve capable of functioning even as a changeover valve or a check valve when the microvalve is mounted on a microchip and capable of easily performing the fine adjustment of a flow rate. SOLUTION: In the microchip composed of an upper substrate and a lower substrate and having at least one microchannel arranged between both substrates, at least one microvalve is inserted in the microchannel at a proper place, the microvalve is composed of two sheet members different in thickness, at least one recess and the air flow channel communicating with the recess are arranged to the thick sheet member, the thin sheet member is bonded to the thick sheet member so as to shield the groove and recess of the thick sheet member, the ratio (T<SB>1</SB>:T<SB>2</SB>) of the thickness (T<SB>1</SB>) of the thin sheet member and the bottom part thickness (T<SB>2</SB>) of the recess is within a range of 1:2-1:10 and the depth (D) of the recess is within a range of 1.3-5 times of the bottom part thickness (T<SB>2</SB>) of the recess. COPYRIGHT: (C)2007,JPO&INPIT
|
