| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a template having a fine pattern for forming a photo-curing resin, equipped with light transmittance, mold release characteristics, durability, mechanical strength and shape stability and also including dimensional precision of the fine pattern. SOLUTION: A solution liquid in which a fluorine-containing polymer (A) substantially having no reactive functional group (x) is solved in a solvent is applied on the pattern of a mold 4 having the reverse pattern of the fine pattern, and the solvent is removed at a temperatures below 80°C to form a fluorine-containing polymer layer 1 on the surface of the mold 4. The outermost surface of the fluorine-containing polymer layer 1 is processed to introduce the reactive functional group (x) on the surface, and the outermost surface and the surface of transparent base material 2 having a functional group (y) on the surface capable of forming chemical bonding to the reactive functional group (x) are stuck together, pressurized at a temperatures below 80°C and bonded. The mold 4 is removed from the fluorine-containing polymer layer 1 to form the fluorine-containing polymer layer 1 having the fine patterns on the surface, thus the template 5 is manufactured. COPYRIGHT: (C)2007,JPO&INPIT
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