发明名称 |
METHODS AND APPARATUS FOR IMPROVING OPERATION OF AN ELECTRONIC DEVICE MANUFACTURING SYSTEM |
摘要 |
<p>In one aspect of the invention, a method for the improved operation of an electronic device manufacturing system is provided. The method include providing information to an interface coupled to an electronic device manufacturing system having parameters, processing the information to predict a first parameter, and providing an instruction related to at least a second parameter of the electronic device manufacturing system wherein the instruction is based on the predicted first parameter. Numerous other aspects are provided.</p> |
申请公布号 |
WO2007109082(A2) |
申请公布日期 |
2007.09.27 |
申请号 |
WO2007US06495 |
申请日期 |
2007.03.14 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
RAOUX, SEBASTIEN;CURRY, MARK, W.;PORSHNEV, PETER;FOX, ALLEN |
分类号 |
G05D16/00 |
主分类号 |
G05D16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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