Light emitting diode primary multi-layer electrodes manufacturing method for e.g. backlight, involves masking epitaxial substrate with magnetizable mask that is hold by magnet, where magnetizable mask has contact windows

摘要

The method involves cleaning a epitaxial substrate, and allowing to bring the epitaxial substrate into a holder. The epitaxial substrate is masked with a magnetizable mask that is held by a magnet, where the magnetizable mask has contact windows. A series of different metal sources with a primary metal layer is vapour-deposited on the epitaxial substrate. A multi-layer electrode is formed in the contact holes, and the mask is removed. The epitaxial substrate is cleaned with acid such as sulfuric acid, phosphoric acid and hydrochloric acid.