| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dry washing method which improves the motion speed and cleanness of a dry washing medium to improve washing quality and washing efficiency and performs dry washing even to shape-complicated components without causing damages and unwashed parts, and also provide a dry washing device. <P>SOLUTION: In the dry washing method in which an object 1 to be washed, to which a deposit 4 adheres, collides with a washing medium 2 to remove the deposit 4 from the washing object 1, a flake-like material, which is flexible and flies off due to an air flow, is used as the washing medium 2. <P>COPYRIGHT: (C)2007,JPO&INPIT |
