| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a practical infrared absorption spectrum of a measured film even when an active substrate forming the measured film is a glass substrate of large infrared absorption. <P>SOLUTION: An infrared reflection layer (support film) 31 is formed on the upper surface of an active substrate 1, a gate insulating film 13 formed on the upper surface of the infrared reflection layer (support film) 31 is used as the measured film 32, and an opening 33 for measurement is formed on the measured film 32. Infrared rays are radiated to the infrared reflection layer (support film) 31 exposed via the opening 33 for measurement, the infrared rays reflected by it are detected, and infrared absorption spectrum for a support film is obtained based on the detection result. Infrared rays are radiated to the measured film 32, the infrared rays that transmit through the measured film 32 and are reflected by the infrared reflection layer 31 are detected, and infrared absorption spectrum for the measured film is obtained based on the detection result. By subtracting the infrared absorption spectrum for the support film from the infrared absorption spectrum for the measured film, Net infrared absorption spectrum of the measured film 32 is obtained. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
