| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for conveying a semiconductor wafer, in which production TAT can be shortened by improving the operation efficiency of a semiconductor manufacturing equipment. SOLUTION: When a management computer commands a conveying vehicle to convey the semiconductor wafer processed in a first processing unit to a second processing unit from the first processing unit, if the management computer confirms that the semiconductor wafer to be processed in the first processing unit exists in a stocker, the semiconductor wafer to be processed in the first processing unit is taken out from the stocker, and the conveying vehicle receives the semiconductor wafer taken out from the stocker and, thereafter, moves toward the first processing unit from the stocker. After the process of the semiconductor wafer is completed in the first processing unit, the conveying vehicle receives the semiconductor wafer processed in the first processing unit from the first processing unit and transfers the semiconductor wafer taken out from the stocker to the first processing unit. COPYRIGHT: (C)2007,JPO&INPIT
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