SUBSTRATE BUFFER DEVICE, SUBSTRATE BUFFERING METHOD, SUBSTRATE PROCESSOR, CONTROL PROGRAM, AND COMPUTER READABLE STORAGE MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a substrate buffer device which is superior in safety even if a substrate is large, can avoid scattering of particles, can improve throughput, and can advance a plurality of saved substrates to a conveyance line in a desired order. SOLUTION: The substrate buffer device 36 is provided with a rack 5 that vertically have a plurality of mounting stands 5a to 5f which can advance to the conveyance line A and on which the substrate G conveyed on the conveyance line A can be mounted, and a lifting mechanism 6 making the rack 5 go up and down and advancing any of the mounting stands 5a to 5f to the conveyance line A. The mounting stands 5a to 5f have conveyer mechanisms 50a to 50f conveying the substrate G in a conveyance direction, and function as a part of the conveyance line A when they advance to the conveyance line A. The substrate G conveyed on the conveyance line A is mounted on the mounting stand 5a advanced to the conveyance line A. The lifting mechanism 6 makes the rack 5 go up and down, and saves the substrate G from the conveyance line A at every mounting stand 5a. COPYRIGHT: (C)2007,JPO&INPIT