发明名称 |
STATIC PRESSURE SLIDER, AND CONVEYING APPARATUS AND PROCESSING APPARATUS HAVING THE SAME |
摘要 |
<p>A static pressure slider having a fixed body (2) and a movable body (3) movable relative to the fixed body (2) with a static pressure fluid layer interposed between the bodies (2, 3). The static pressure slider further has a first conductor layer (25) (26 to 28) and also has a second conductor layer (31A) (32A to 34A) at least a part of which second conductor layer can have a variable distance from the first conductor layer (25) (26 to 28) by the effect of electrostatic force between the first conductor layer (25) (26 to 28) and the second conductor layer (31A) (32A to 34A). A conveying apparatus and processing apparatus having the static pressure slider are also provided.</p> |
申请公布号 |
WO2007108399(A1) |
申请公布日期 |
2007.09.27 |
申请号 |
WO2007JP55249 |
申请日期 |
2007.03.15 |
申请人 |
KYOCERA CORPORATION;MUNEISHI, TAKESHI |
发明人 |
MUNEISHI, TAKESHI |
分类号 |
F16C32/06 |
主分类号 |
F16C32/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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