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发明名称
摘要
申请公布号
JP2007527623(A)
申请公布日期
2007.09.27
申请号
JP20060553315
申请日期
2005.02.14
申请人
发明人
分类号
H01L21/8238;H01L21/28;H01L21/336;H01L21/76;H01L21/762;H01L21/764;H01L27/04;H01L27/06;H01L27/092;H01L27/12;H01L29/12;H01L29/20;H01L29/423;H01L29/49;H01L29/76;H01L29/78;H01L29/786
主分类号
H01L21/8238
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