发明名称 SEMICONDUCTOR DEVICE AND METHOD AND DEVICE FOR MANUFACTURING SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a highly reliable semiconductor device and a method for manufacturing it by eliminating any void or internal residual stress between wiring layers. <P>SOLUTION: A semiconductor device is provided with a plurality of wiring boards having members (11, 21, 31) for vertical connection on which one or more semiconductor elements are mounted; insulating layers (13, 23, 33) interposed between the plurality of wiring boards; a laminate in which they are mutually laminated; and a surface layer board (45) laminated in the uppermost layer of the laminate, and equipped with a recessing or projecting trace (46) on the surface. A method for manufacturing the semiconductor device is provided to hold the laminate configurations between metallic molds (100, 200) for carrying out heating and pressurization in its non-contact status on the pressurization face, and to heat and pressurize the laminate configurations by the metallic molds in a pressure reduction status, and to connect the boards by the members for connection, and to form the insulating layers by melting the insulating materials between the boards. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2007251000(A) 申请公布日期 2007.09.27
申请号 JP20060074741 申请日期 2006.03.17
申请人 TOSHIBA CORP 发明人 MATSUI MIKIO;YOSHIMURA ATSUSHI
分类号 H01L25/10;H01L25/11;H01L25/18;H05K3/46 主分类号 H01L25/10
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