| 摘要 |
PROBLEM TO BE SOLVED: To provide a member for supporting a substrate without leaving a pin trace on the substrate caused by a temperature unevenness. SOLUTION: A tip end part 8 of a supporting pin 7 is capable of rising and setting from a through-hole 5 formed on a mounting stage 1 in order to support the substrate W on the mounting stage 1, the part 8 of the pin 7 is supported by a coil spring 12 inserted into a rod tip end part 11a, and the tip of the part 8 protrudes from the mounting stage 1 by about 1 to 2 mm without the substrate W mounted. The part 8 of the pin 7 shrinks by the own weight of the substrate W, and the tip flat surface of the part 8 is in the same plane with the mounting stage 1. COPYRIGHT: (C)2007,JPO&INPIT |
