DETERMINING FLEET MATCHING PROBLEM AND ROOT CAUSE ISSUE FOR MEASUREMENT SYSTEM
摘要
Methods, systems and program products are disclosed for determining whether a measurement system under test (MSUT) matches a fleet including at least one other measurement system. The invention implements realistic parameters for analyzing a matching problem including single tool precision, tool-to-tool non-linearities and tool-to-tool offsets. A bottom-line tool matching precision metric that combines these parameters into a single value is then implemented. The invention also includes methods for determining a root cause of a matching problem (sl0), and for determining a fleet measurement precision metric (s4).
申请公布号
WO2006093747(A3)
申请公布日期
2007.09.27
申请号
WO2006US06224
申请日期
2006.02.22
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION;ARCHIE, CHARLES, N.;BANKE, GEORGE, W., JR.;SOLECKY, ERIC, P.
发明人
ARCHIE, CHARLES, N.;BANKE, GEORGE, W., JR.;SOLECKY, ERIC, P.