发明名称 RESIN SEALING MOLDING DEVICE OF SEMICONDUCTOR CHIP
摘要 PROBLEM TO BE SOLVED: To provide a resin sealing molding device of a semiconductor chip which improves productivity in a molding process furthermore by coupling a required number of arrangement constitutions wherein one substrate is subjected to compression molding to a pair of compressing molding dies after consistently effectively and smoothly carrying out processes before and after a molding process in a production line such as a pre (bonding) process and a post (dicing) process. SOLUTION: In the device 1, a required number of chips 15 fitted to one substrate 14 are subjected to resin sealing by compression molding to a pair of molds 5 by combinedly using evacuation molding in addition to the molding of a release film 36 by a pair of compression molding molds 5, that is, the mold 5 of a constitution of three molds (33, 34 and 35), and a required number of pairs of compression molding molds 5 (press unit 7) are arranged while being coupled. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007251094(A) 申请公布日期 2007.09.27
申请号 JP20060076280 申请日期 2006.03.20
申请人 TOWA CORP 发明人 URAGAMI HIROSHI;NAKAMURA MAMORU;TAKAHASHI MASANOBU;FUJINO KINYA;DENTO KATSUNORI
分类号 H01L21/56;B29C33/14;B29C33/68;B29C43/18;B29C43/36;B29L9/00 主分类号 H01L21/56
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