| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for making a film formed body consisting of oxides of high optical transmittance by an aerosol deposition method. SOLUTION: Surface layers of raw fine particles consisting of oxides are turned to be in an oxygen-want state, and a carrier gas having the oxidizing property is used to promote the cohesion between particles generated at the time of substrate collision/cracking of the raw fine particles. Thereby, generation of voids is suppressed, the denseness of a film deposition body is enhanced, and its transmittance is enhanced. COPYRIGHT: (C)2007,JPO&INPIT
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